College Catalog
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Course Descriptions
EET277
Characterization, Packaging, and Testing of Nanofabricated Structures (PSU: ESC216)
This course examines a variety of measurements and techniques essential for device fabrication. Monitoring techniques such as residual gas analysis (RGA), optical emission spectroscopy (OES), and end point detection will be discussed. Characterization techniques such as SEM, XPS/Auger, surface profilometry, advanced optical microscopy, optical thin film measurements, ellipsometry, and resistivity/conductivity measurements will be used on real samples. Basic electrical measurements on device structures for yield analysis and process control will also be stressed. These will include breakdown measurements, junction testing, and C-V and I-V tests. 3 Credits (2 Lecture - 3 Lab)
Prerequisite(s): EET271.