College Catalog

Characterization, Packaging, and Testing of Nanofabricated Structures (PSU: ESC216)


Examination of a variety of measurements and techniques essential for device fabrication. Monitoring techniques, such as residual gas analysis (RGA), optical emission spectroscopy (OES), and end point detection, are discussed. Characterization techniques, such as SEM, XPS/Auger, surface profilometry, advanced optical microscopy, optical thin film measurements, ellipsometry, and resistivity/conductivity measurements, are used on real samples. Basic electrical measurements on device structures for yield analysis and process control are stressed, including breakdown measurements, junction testing, and C-V and I-V tests. 3 Credits (2 Lecture - 3 Lab)

Pennsylvania College of Technology
One College Avenue
Williamsport, PA 17701


© 1995 Pennsylvania College of Technology. Penn College® and degrees that work® are registered in the U.S. Patent and Trademark Office.