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College Catalog

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Course Descriptions

EET276
Materials Modification in Nanofabrication (PSU: ESC215)
In this course the student will learn about the manufacturing issues involved in metal interconnects, dielectrics and final device assembly. Aluminum, refractory metals and copper deposition techniques and characterization will be discussed in detail along with topics such as diffusion barriers, contact resistance, electromigration, corrosion, and adhesion. The importance of planarization techniques such as deposition/etchback and chemical/mechanical polishing will be emphasized. Lastly, packaging procedures such as die separation, inspection bonding, sealing, and final test will be examined. (Formerly EET 264) 3 Credits (2 Lecture - 3 Lab) Prerequisite(s): EET271.