College Catalog
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Course Descriptions
EET275
Advanced Lithography and Patterning Techniques (PSU: ESC214)
This course will cover all aspects of lithography from design and mask fabrication to pattern transfer and inspection. The course is divided into three major sections. The first section describes the lithographic process from substrate preparation to exposure. Most of the emphasis will be on understanding the nature and behavior or photoresist materials. The second section examines the process from development through inspection (both before and after pattern transfer). This section will introduce optical masks, aligners, steppers, and scanners. In addition, CD control and profile control of photoresists will be investigated. The last section will discuss advanced lithographic techniques such as c-beam, x-ray, EUV, and ion beam lithography. 3 Credits (2 Lecture - 3 Lab)
Prerequisite(s): EET271.