College Catalog
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Course Descriptions
EET273
Basic Nanofabrication Processes (PSU: ESC212)
This course will cover in detail the thermal processing necessary for semiconductor fabrication. Growth and annealing processes, which utilize horizontal and vertical furnaces, will be examined as well as rapid thermal annealing. This course will cover single crystal growth (Czochralski, float-zone) as well as wafer slicing, etching, polishing, epitaxial growth, and substrate (bulk or epi) specifications. The course will address the impact of thermal processing and thermal processing history on defects, gettering, impurities, and overall device properties. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements using state-of-the-art tools. 3 Credits (2 Lecture - 3 Lab)
Prerequisite(s): EET271.